Large-scale nanopatterning of metal surfaces by target-ion induced plasma sputtering (TIPS)
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jang, Tae-Sik | - |
dc.contributor.author | Kim, Sungwon | - |
dc.contributor.author | Jung, Hyun-Do | - |
dc.contributor.author | Chung, Jin-Wook | - |
dc.contributor.author | Kim, Hyoun-Ee | - |
dc.contributor.author | Koh, Young-Hag | - |
dc.contributor.author | Song, Juha | - |
dc.date.accessioned | 2021-09-04T05:01:02Z | - |
dc.date.available | 2021-09-04T05:01:02Z | - |
dc.date.created | 2021-06-18 | - |
dc.date.issued | 2016 | - |
dc.identifier.issn | 2046-2069 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/90151 | - |
dc.description.abstract | Target-ion induced plasma sputtering (TIPS) is a one-step self organization nanofabrication method in which a conventional DC magnetron sputter with a negative substrate bias voltage is used. This process successfully leads to ion-induced sputtering on metal substrates, producing large-scale nanopatterns on various metal surfaces. We demonstrated that the obtained nanopatterns have size-tunability from nano-to micro-scales by modulating the negative substrate voltage. This large-scale, bottom-up nanofabrication technique will accelerate nanopattern applications in biomedical, chemical or magnetic devices through large surface-to-volume ratios and unique surface topography of induced ripple patterns on metals. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | ROYAL SOC CHEMISTRY | - |
dc.subject | TANTALUM | - |
dc.subject | FABRICATION | - |
dc.subject | SIZE | - |
dc.title | Large-scale nanopatterning of metal surfaces by target-ion induced plasma sputtering (TIPS) | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Koh, Young-Hag | - |
dc.identifier.doi | 10.1039/c6ra00443a | - |
dc.identifier.scopusid | 2-s2.0-84960157743 | - |
dc.identifier.wosid | 000372253200070 | - |
dc.identifier.bibliographicCitation | RSC ADVANCES, v.6, no.28, pp.23702 - 23708 | - |
dc.relation.isPartOf | RSC ADVANCES | - |
dc.citation.title | RSC ADVANCES | - |
dc.citation.volume | 6 | - |
dc.citation.number | 28 | - |
dc.citation.startPage | 23702 | - |
dc.citation.endPage | 23708 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.subject.keywordPlus | TANTALUM | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | SIZE | - |
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