Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Large-scale nanopatterning of metal surfaces by target-ion induced plasma sputtering (TIPS)

Authors
Jang, Tae-SikKim, SungwonJung, Hyun-DoChung, Jin-WookKim, Hyoun-EeKoh, Young-HagSong, Juha
Issue Date
2016
Publisher
ROYAL SOC CHEMISTRY
Citation
RSC ADVANCES, v.6, no.28, pp.23702 - 23708
Indexed
SCIE
SCOPUS
Journal Title
RSC ADVANCES
Volume
6
Number
28
Start Page
23702
End Page
23708
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/90151
DOI
10.1039/c6ra00443a
ISSN
2046-2069
Abstract
Target-ion induced plasma sputtering (TIPS) is a one-step self organization nanofabrication method in which a conventional DC magnetron sputter with a negative substrate bias voltage is used. This process successfully leads to ion-induced sputtering on metal substrates, producing large-scale nanopatterns on various metal surfaces. We demonstrated that the obtained nanopatterns have size-tunability from nano-to micro-scales by modulating the negative substrate voltage. This large-scale, bottom-up nanofabrication technique will accelerate nanopattern applications in biomedical, chemical or magnetic devices through large surface-to-volume ratios and unique surface topography of induced ripple patterns on metals.
Files in This Item
There are no files associated with this item.
Appears in
Collections
Graduate School > Department of Bioengineering > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Koh, Young Hag photo

Koh, Young Hag
바이오의공학과
Read more

Altmetrics

Total Views & Downloads

BROWSE