Effects of Pre-annealing on Firing Stability of Atomic Layer-Deposited Al2O3
- Authors
- Bae, Soohyun; Kim, Soo Min; Lee, Kyung Dong; Kim, Young Do; Park, Sungeun; Kang, Yoonmook; Lee, Hae-Seok; Kim, Donghwan
- Issue Date
- 10월-2015
- Publisher
- WILEY-V C H VERLAG GMBH
- Keywords
- Al2O3; passivation; semiconducting materials; solar cells; thin films
- Citation
- ISRAEL JOURNAL OF CHEMISTRY, v.55, no.10, pp.1075 - 1080
- Indexed
- SCIE
SCOPUS
- Journal Title
- ISRAEL JOURNAL OF CHEMISTRY
- Volume
- 55
- Number
- 10
- Start Page
- 1075
- End Page
- 1080
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/92278
- DOI
- 10.1002/ijch.201400192
- ISSN
- 0021-2148
- Abstract
- Al2O3 layers fabricated with atomic layer deposition (ALD) show high levels of surface passivation on p- and n-type silicon wafers. In order to form front and rear electrodes, Al2O3 layers should undergo a firing process at a high peak temperature. Therefore, the Al2O3 layer must be stable under these conditions to maintain a high level of surface passivation during the firing process. In this study, Al2O3 layers fabricated with ALD were pre-annealed to enhance their thermal stability during the firing process. From quasi-steady state photoconductance (QSSPC) measurements, the difference between the implied V-oc values of the pre-annealed and fired samples was found to be smallest (3mV) when the sample was pre-annealed at 620 degrees C. The surface recombination rate calculated from capacitance-voltage (C-V) measurements of metal-Al2O3-Si (metal-insulator-semiconductor) structures was shown to be low when the sample was pre-annealed at 600-650 degrees C. Thus, firing stability was achieved with pre-annealing at 620 degrees C by reducing the surface recombination rate. We conclude that it is necessary to pre-anneal the Al2O3 passivation layer at this specific temperature to reduce the degradation of the passivation quality of Al2O3 after the firing process.
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Collections - Graduate School of Energy and Environment (KU-KIST GREEN SCHOOL) > Department of Energy and Environment > 1. Journal Articles
- College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles
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