An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition
DC Field | Value | Language |
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dc.contributor.author | Choo, Sung Joong | - |
dc.contributor.author | Kim, Jinsik | - |
dc.contributor.author | Lee, Kyung Woon | - |
dc.contributor.author | Lee, Dong Ho | - |
dc.contributor.author | Shin, Hyun-Joon | - |
dc.contributor.author | Park, Jung Ho | - |
dc.date.accessioned | 2021-09-05T07:16:18Z | - |
dc.date.available | 2021-09-05T07:16:18Z | - |
dc.date.created | 2021-06-15 | - |
dc.date.issued | 2014-07 | - |
dc.identifier.issn | 1567-1739 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/98045 | - |
dc.description.abstract | We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on Silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device. (C) 2014 Elsevier B.V. All rights reserved. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject | SENSOR | - |
dc.title | An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jung Ho | - |
dc.identifier.doi | 10.1016/j.cap.2014.04.016 | - |
dc.identifier.scopusid | 2-s2.0-84901392681 | - |
dc.identifier.wosid | 000338403700009 | - |
dc.identifier.bibliographicCitation | CURRENT APPLIED PHYSICS, v.14, no.7, pp.954 - 959 | - |
dc.relation.isPartOf | CURRENT APPLIED PHYSICS | - |
dc.citation.title | CURRENT APPLIED PHYSICS | - |
dc.citation.volume | 14 | - |
dc.citation.number | 7 | - |
dc.citation.startPage | 954 | - |
dc.citation.endPage | 959 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.identifier.kciid | ART001895927 | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | SENSOR | - |
dc.subject.keywordAuthor | Integrated Mach-Zehnder interferometric biochip | - |
dc.subject.keywordAuthor | Silicon oxynitride layers | - |
dc.subject.keywordAuthor | Plasma-enhanced chemical vapor deposition | - |
dc.subject.keywordAuthor | DNA | - |
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