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An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition
- Issue Date
- 7월-2014
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- Integrated Mach-Zehnder interferometric biochip; Silicon oxynitride layers; Plasma-enhanced chemical vapor deposition; DNA
- Citation
- CURRENT APPLIED PHYSICS, v.14, no.7, pp.954 - 959
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- CURRENT APPLIED PHYSICS
- Volume
- 14
- Number
- 7
- Start Page
- 954
- End Page
- 959
- ISSN
- 1567-1739
- Abstract
- We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on Silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device. (C) 2014 Elsevier B.V. All rights reserved.
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