Vibration atomic layer deposition for conformal nanoparticle coating
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Suk Won | - |
dc.contributor.author | Kim, Jun Woo | - |
dc.contributor.author | Choi, Hyung Jong | - |
dc.contributor.author | Shim, Joon Hyung | - |
dc.date.accessioned | 2021-09-05T12:44:41Z | - |
dc.date.available | 2021-09-05T12:44:41Z | - |
dc.date.created | 2021-06-15 | - |
dc.date.issued | 2014-01 | - |
dc.identifier.issn | 0734-2101 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/99678 | - |
dc.description.abstract | A vibration atomic layer deposition reactor was developed for fabricating a conformal thin-film coating on nanosize particles. In this study, atomic layer deposition of 10-15-nm-thick Al2O3 films was conducted on a high-surface-area acetylene black powder with particle diameters of 200-250 nm. Intense vibration during the deposition resulted in the effective separation of particles, overcoming the interparticle agglomeration force and enabling effective diffusion of the precursor into the powder chunk; this phenomenon led to the formation of a conformal film coating on the nanopowder particles. It was also confirmed that the atomic layer deposition Al2O3 films initially grew on the high-surface-area acetylene black powder particles as discrete islands, presumably because chemisorption of the precursor and water occurred only on a few sites on the high-surface-area acetylene black powder surface. Relatively sluggish growth of the films during the initial atomic layer deposition cycles was identified from composition analysis. (C) 2014 American Vacuum Society. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | A V S AMER INST PHYSICS | - |
dc.subject | FLUIDIZED-BED REACTOR | - |
dc.subject | THIN-FILM GROWTH | - |
dc.subject | ROTARY REACTOR | - |
dc.subject | PARTICLES | - |
dc.subject | FORCES | - |
dc.subject | ALD | - |
dc.title | Vibration atomic layer deposition for conformal nanoparticle coating | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Shim, Joon Hyung | - |
dc.identifier.doi | 10.1116/1.4845735 | - |
dc.identifier.scopusid | 2-s2.0-84891762581 | - |
dc.identifier.wosid | 000335847600015 | - |
dc.identifier.bibliographicCitation | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.32, no.1 | - |
dc.relation.isPartOf | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.citation.title | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | - |
dc.citation.volume | 32 | - |
dc.citation.number | 1 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | FLUIDIZED-BED REACTOR | - |
dc.subject.keywordPlus | THIN-FILM GROWTH | - |
dc.subject.keywordPlus | ROTARY REACTOR | - |
dc.subject.keywordPlus | PARTICLES | - |
dc.subject.keywordPlus | FORCES | - |
dc.subject.keywordPlus | ALD | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
(02841) 서울특별시 성북구 안암로 14502-3290-1114
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.