Vibration atomic layer deposition for conformal nanoparticle coating
- Authors
- Park, Suk Won; Kim, Jun Woo; Choi, Hyung Jong; Shim, Joon Hyung
- Issue Date
- 1월-2014
- Publisher
- A V S AMER INST PHYSICS
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.32, no.1
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
- Volume
- 32
- Number
- 1
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/99678
- DOI
- 10.1116/1.4845735
- ISSN
- 0734-2101
- Abstract
- A vibration atomic layer deposition reactor was developed for fabricating a conformal thin-film coating on nanosize particles. In this study, atomic layer deposition of 10-15-nm-thick Al2O3 films was conducted on a high-surface-area acetylene black powder with particle diameters of 200-250 nm. Intense vibration during the deposition resulted in the effective separation of particles, overcoming the interparticle agglomeration force and enabling effective diffusion of the precursor into the powder chunk; this phenomenon led to the formation of a conformal film coating on the nanopowder particles. It was also confirmed that the atomic layer deposition Al2O3 films initially grew on the high-surface-area acetylene black powder particles as discrete islands, presumably because chemisorption of the precursor and water occurred only on a few sites on the high-surface-area acetylene black powder surface. Relatively sluggish growth of the films during the initial atomic layer deposition cycles was identified from composition analysis. (C) 2014 American Vacuum Society.
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Collections - College of Engineering > Department of Mechanical Engineering > 1. Journal Articles
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