Electromechanical model of a piezoelectric actuator-sensor pair

초록

In the present work, a theoretical model for a soft piezoelectric actuator-sensor pair is proposed. Specifically, the pair consists of a thin film actuator and a sensor. Between the actuator and the sensor, there is a tiny gap. The actuator generates an electric field and mechanical vibration when the input voltage is applied. Mutual capacitance between the electrodes of the actuator and the sensor induces electrical signal transfers, and the vibration causes a voltage in the sensor by mechanical transfer. In the model, mutual capacitance is considered as fringe capacitance, and the vibration transmission is analyzed by calculating beam deflection using Euler-Bernoulli beam theory. The frequency response of the actuator-sensor pair was analytically investigated with the modeling framework. The proposed model was compared with experimental results to validate the theoretical framework. There is good agreement between experimental and modeling results. In addition, parametric studies were conducted to obtain insights about the design of the actuator-sensor pair from the model. The proposed model provides a theoretical foundation for understanding the coupled electromechanical behavior of piezoelectric actuator-sensor pair, enabling design optimization.

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