Enhancement of the durability of micro-four-point probe systems using position-sensitive detector sensors

초록

Traditional micro-four-point probe (M4PP) methods rely heavily on operator judgment for contact-force control, leading to high measurement variability and fewer than 400 reliable cycles. This study presents an enhanced M4PP system that incorporates a position-sensitive detector (PSD) sensor-based landing module to overcome these limitations. By integrating the PSD sensor, which enables micro-Newton-level contact-force control, the system substantially improves positional accuracy and measurement durability. Experimental results demonstrated a significant reduction in standard deviation and an increase in endurance to over 4500 cycles. Statistical analyses further confirmed that the PSD sensor-based landing module effectively minimized operator-dependent errors and enhanced overall measurement precision. These findings suggest that the proposed system significantly improves the reliability and repeatability of sheet-resistance measurements in thin-film devices, broadening the applicability of M4PP technology in advanced semiconductor manufacturing.

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