Lee, Byeonghee; Lee, Joon Sik; Kim, Sun Ung; Kim, Kyeongtae; Kwon, Ohmyoung; Lee, Seungkoo; Kim, Jong Hoon; Lim, Dae Soon
ArticleIssue Date2009CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.27, no.6, pp.2408 - 2412PublisherA V S AMER INST PHYSICS