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Properties of amorphous silicon thin films synthesized by reactive particle beam assisted chemical vapor deposition

Choi, Sun Gyu; Wang, Seok-Joo; Park, Hyeong-Ho; Jang, Jin-Nyoung; Hong, MunPyo; Kwon, Kwang-Ho; Park, Hyung-Ho

ArticleIssue Date2010CitationTHIN SOLID FILMS, v.518, no.24, pp 7372 - 7376PublisherELSEVIER SCIENCE SA
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