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Investigation on the Temperature Dependence of the Performance of Solution Processed Si-Zn-Sn Oxide Thin Film Transistor

Authors
Choi, Jun YoungKim, Sang SigLee, Sang Yeol
Issue Date
10월-2013
Publisher
AMER SCIENTIFIC PUBLISHERS
Keywords
Oxide Thin Film Transistors; SiZnSnO; Solution Process
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.13, no.10, pp.7089 - 7091
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume
13
Number
10
Start Page
7089
End Page
7091
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/102069
DOI
10.1166/jnn.2013.7632
ISSN
1533-4880
Abstract
The performance of the oxide thin film transistors (TFTs) using silicon zinc tin oxide (SZTO) as active channel layer fabricated by solution process method has been reported investigated depending on the annealing temperature. The SZTO TFTs fabricated on silicon wafers exhibit a mobility of 0.591 cm(2)/Vs, a subthreshold swing (S. S) of 0.44 V/decade, a threshold voltage of 0.7 V and an I-on/off ratio of 4.4x10(6).
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공과대학 (전기전자공학부)
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