Effect of boron and silicon doping on the surface and electrical properties of diamond like carbon films by magnetron sputtering technique
DC Field | Value | Language |
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dc.contributor.author | Park, Chang-Sun | - |
dc.contributor.author | Choi, Sun Gyu | - |
dc.contributor.author | Jang, Jin-Nyoung | - |
dc.contributor.author | Hong, MunPyo | - |
dc.contributor.author | Kwon, Kwang-Ho | - |
dc.contributor.author | Park, Hyung-Ho | - |
dc.date.accessioned | 2021-09-05T22:21:32Z | - |
dc.date.available | 2021-09-05T22:21:32Z | - |
dc.date.created | 2021-06-14 | - |
dc.date.issued | 2013-09 | - |
dc.identifier.issn | 0257-8972 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/102358 | - |
dc.description.abstract | To improve the surface and electrical properties, silicon (Si) and boron (B) were co-doped in diamond-like carbon (DLC) films prepared on silica substrates by RF magnetron sputtering. In the deposition of a Si, B co-doped DLC film, Si content was controlled by the number of intrinsic Si wafer piece and B content by B target power. The surface roughness and resistivity of film increased by increment in the C-C sp(3) bond content due to added Si and the surface roughness and resistivity of film decreased by decrement in the C-C sp(2) bond content due to added B. A C-C sp(3) bond content in the Si, B co-doped DLC films decreased from 47.4% to 36.5% with increasing B target power compared with from 46.7% to 23.9% in case of the only B doped DLC films. From this result, it can be said that Si can suppress a graphitization of DLC with presence of B. However, the surface roughness and resistivity values of Si, B co-doped DLC films decreased similarly as in only B doped DLC films with an increase in the B target power. These results were caused the Si-B sp(3) bonds formed smaller than Si sp(3) bonds with increase in the B target power as a result of the B-doping effect. In order to minimize the reduction in sp(3) bond content over the decrease roughness and resistivity, DLC films were prepared by Si, B co-doping. So, these films can be applied in chemical sensing, electro-synthesis, and electrochemical-based toxic waste detection, remediation, and so on at industrial level. (C) 2012 Elsevier B.V. All rights reserved. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.subject | AMORPHOUS-CARBON | - |
dc.subject | TRIBOLOGICAL PROPERTIES | - |
dc.subject | DEPOSITION | - |
dc.subject | STRESS | - |
dc.title | Effect of boron and silicon doping on the surface and electrical properties of diamond like carbon films by magnetron sputtering technique | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Jang, Jin-Nyoung | - |
dc.contributor.affiliatedAuthor | Hong, MunPyo | - |
dc.contributor.affiliatedAuthor | Kwon, Kwang-Ho | - |
dc.identifier.doi | 10.1016/j.surfcoat.2012.01.014 | - |
dc.identifier.scopusid | 2-s2.0-84882920327 | - |
dc.identifier.wosid | 000328094200029 | - |
dc.identifier.bibliographicCitation | SURFACE & COATINGS TECHNOLOGY, v.231, pp.131 - 134 | - |
dc.relation.isPartOf | SURFACE & COATINGS TECHNOLOGY | - |
dc.citation.title | SURFACE & COATINGS TECHNOLOGY | - |
dc.citation.volume | 231 | - |
dc.citation.startPage | 131 | - |
dc.citation.endPage | 134 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | AMORPHOUS-CARBON | - |
dc.subject.keywordPlus | TRIBOLOGICAL PROPERTIES | - |
dc.subject.keywordPlus | DEPOSITION | - |
dc.subject.keywordPlus | STRESS | - |
dc.subject.keywordAuthor | Diamond-like carbon | - |
dc.subject.keywordAuthor | Silicon | - |
dc.subject.keywordAuthor | Boron | - |
dc.subject.keywordAuthor | Roughness | - |
dc.subject.keywordAuthor | Resistivity | - |
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