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Resistive-switching behavior in Ti/Si3N4/Ti memory structures for ReRAM applications

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dc.contributor.authorKim, Hee-Dong-
dc.contributor.authorAn, Ho-Myoung-
dc.contributor.authorKim, Tae Geun-
dc.date.accessioned2021-09-06T14:44:12Z-
dc.date.available2021-09-06T14:44:12Z-
dc.date.created2021-06-15-
dc.date.issued2012-10-
dc.identifier.issn0167-9317-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/107243-
dc.description.abstractIn this paper, the resistive-switching behavior of Si3N4 films using nitride-related traps in Ti/Si3N4/Ti memory cells is reported. Bipolar resistive switching behavior was clearly observed at a low voltage of about +/- 2.5 V. Compared to Au/Si3N4/Ti memory cells, the set and reset current of Ti/Si3N4/Ti memory cells was decreased from 5 mu A and 1.5 mA to 40 nA and 1 mu A, respectively, at V-read = 0.1 V. In addition, Ti/Si3N4/Ti memory cells showed improved endurance characteristics over 2.7 x 10(3) cycles. (C) 2012 Elsevier B.V. All rights reserved.-
dc.languageEnglish-
dc.language.isoen-
dc.publisherELSEVIER SCIENCE BV-
dc.titleResistive-switching behavior in Ti/Si3N4/Ti memory structures for ReRAM applications-
dc.typeArticle-
dc.contributor.affiliatedAuthorKim, Tae Geun-
dc.identifier.doi10.1016/j.mee.2012.07.052-
dc.identifier.wosid000309497200077-
dc.identifier.bibliographicCitationMICROELECTRONIC ENGINEERING, v.98, pp.351 - 354-
dc.relation.isPartOfMICROELECTRONIC ENGINEERING-
dc.citation.titleMICROELECTRONIC ENGINEERING-
dc.citation.volume98-
dc.citation.startPage351-
dc.citation.endPage354-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.description.journalClass1-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaOptics-
dc.relation.journalResearchAreaPhysics-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryOptics-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.subject.keywordAuthorResistive switching memory-
dc.subject.keywordAuthorSi3N4-
dc.subject.keywordAuthorSpace charge limited current-
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