Effects of temperature on ZnO hybrids grown by metal-organic chemical vapor deposition
- Authors
- Kim, A-Young; Fang, Samseok; Lee, Do Han; Yim, So Young; Byun, Dongjin
- Issue Date
- 10월-2012
- Publisher
- PERGAMON-ELSEVIER SCIENCE LTD
- Keywords
- Nanostructures; Oxides; Thin films; Epitaxial growth; Vapor deposition
- Citation
- MATERIALS RESEARCH BULLETIN, v.47, no.10, pp.2888 - 2890
- Indexed
- SCIE
SCOPUS
- Journal Title
- MATERIALS RESEARCH BULLETIN
- Volume
- 47
- Number
- 10
- Start Page
- 2888
- End Page
- 2890
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/107274
- DOI
- 10.1016/j.materresbull.2012.04.099
- ISSN
- 0025-5408
- Abstract
- The growth of three-dimensional ZnO hybrid structures by metal-organic chemical vapor deposition was controlled through their growth pressure and temperature. Vertically aligned ZnO nanorods were grown on c-plane of sapphire substrate at 600 degrees C and 400 Torr. ZnO film was then formed in situ on the ZnO nanorods at 100, 600, and 700 degrees C and 10 Torr. High-resolution X-ray diffraction measurements showed that the ZnO film on the nanorods/sapphire grew epitaxially, and that the ZnO film/nanorods hybrid structures had well-ordered wurtzite structures. The hybrid ZnO structure was shown to be about 3-5 mu m by field-emission scanning electron microscopy. The hybrid formed at 600 degrees C showed better crystalline quality those formed at 100 C or 700 degrees C. These structures have potential applicability as nanobuilding blocks in nanodevices. Published by Elsevier Ltd.
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Collections - College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles
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