Residual strain measurement of piezoelectric multilayers by spiral structure
- Authors
- Park, Jun-Hyub; Oh, Young-Ryun; Nam, Hyun-Suk; Kim, Yun-Jae; Kim, Tae-Hyun; Kim, Hee-Yeoun
- Issue Date
- 7월-2012
- Publisher
- KOREAN SOC MECHANICAL ENGINEERS
- Keywords
- Multilayers; Piezoelectric; Residual strain; Spiral beam
- Citation
- JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, v.26, no.7, pp.2139 - 2142
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY
- Volume
- 26
- Number
- 7
- Start Page
- 2139
- End Page
- 2142
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/107969
- DOI
- 10.1007/s12206-012-0531-3
- ISSN
- 1738-494X
- Abstract
- A new structure is described to measure the residual strain of thin film of piezoelectric multi-layers. The spiral shaped structure consists of the four fixed-guided beams. Piezoelectric multilayers consisting of SiOx/Pt/PZT/Pt on SiNx substrate are used to evaluate the suggested structure. Finite element analysis predicts that the out-of-plane displacement of the spiral structure by residual stress depends linearly on the beam length, but there is litte difference depending on the beam width. PZT is prepared by sol-gel method and multilayered spiral structures are released by micro];abrication technique. Sensitivity analysis of the spiral structure with various layer stack shows that the high displacement of piezoelectric multilayers can be decreased by the application of SiOx layer with compressive stress over the piezoelectric multilayers.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Department of Mechanical Engineering > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.