Increased Light Extraction From Vertical GaN Light-Emitting Diodes With Ordered, Cone-Shaped Deep-Pillar Nanostructures
- Authors
- An, Ho-Myoung; Sim, Jae In; Shin, Ki Seob; Sung, Yun Mo; Kim, Tae Geun
- Issue Date
- 7월-2012
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Keywords
- Cone-shaped; double layer coating; gallium nitride; honeycomb-type; nanosphere lithography; vertical light emitting diode
- Citation
- IEEE JOURNAL OF QUANTUM ELECTRONICS, v.48, no.7, pp.891 - 896
- Indexed
- SCIE
SCOPUS
- Journal Title
- IEEE JOURNAL OF QUANTUM ELECTRONICS
- Volume
- 48
- Number
- 7
- Start Page
- 891
- End Page
- 896
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/108007
- DOI
- 10.1109/JQE.2012.2190587
- ISSN
- 0018-9197
- Abstract
- In this paper, improved light extraction using cone-shaped deep-pillar nanostructures is demonstrated on the Honeycomb-type vertical GaN light-emitting diodes (VLEDs). In order to produce ordered, cone-shaped deep-pillar patterns on the surface of an n-type GaN, double-layered polystyrene (PS) nanospheres of 500-nm size were coated onto the n-GaN layer by a simple spin-coating. Then, immediately after the O-2 plasma ashing for double-layered PS beads, the Ni metal was deposited and lifted off to form a hard mask for deep pillar etching. Then, the three VLEDs - the reference VLED with no patterns and the two VLEDs with ordered, cone-shaped pillar patterns of 1.0 and 1.5 mu m depth on the n-type GaN surface - were prepared for comparison. As a result, the output power for the proposed VLEDs with 1.0- and 1.5-mu m-deep cone-shaped patterns has been increased by 200% and 214%, respectively, at 350 mA as compared to the reference VLED. There was a slight sacrifice of operational voltage and leakage current. The improved optical properties are attributed to the multiple scattering of light from the sidewall of the cone-shaped patterns and the increased surface dimension.
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Collections - College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles
- College of Engineering > School of Electrical Engineering > 1. Journal Articles
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