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Effect of hafnium addition on Zn-Sn-O thin film transistors fabricated by solution process

Authors
Choi, Jun YoungKim, Sang SigLee, Sang Yeol
Issue Date
9-1월-2012
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v.100, no.2
Indexed
SCIE
SCOPUS
Journal Title
APPLIED PHYSICS LETTERS
Volume
100
Number
2
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/109091
DOI
10.1063/1.3669700
ISSN
0003-6951
Abstract
The feasibility of controlling the threshold voltage (V-th) and field effect mobility (mu(FE)) has been studied by adjusting hafnium ratio. Hafnium zinc tin oxide (HZTO) thin films were fabricated with various hafnium ratios. V-th shifted toward positive direction, and the mu(FE) was decreased due to the decrease of carrier concentration, because hafnium acts as carrier suppressor. The subthreshold swing exhibits good properties from 1.01 to 0.44. The decrease of carrier concentration in HZTO is closely related with the decrease of the number of oxygen by hafnium ion. (C) 2012 American Institute of Physics. [doi: 10.1063/1.3669700]
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Kim, Sang sig
공과대학 (전기전자공학부)
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