Novel fabrication technique for nanoscale hydrogen silsesquioxane structures using a direct printing technique
- Authors
- Yang, Ki-Yeon; Oh, Sang-Chul; Park, Hyungwon; Lee, Heon
- Issue Date
- 9월-2011
- Publisher
- A V S AMER INST PHYSICS
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.29, no.5
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Volume
- 29
- Number
- 5
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/111709
- DOI
- 10.1116/1.3628585
- ISSN
- 1071-1023
- Abstract
- Hydrogen silsesquioxane (HSQ), a type of spin-on glass, is an attractive material for nanobio, semiconductor and photoelectronic applications because it can be transformed into SiO2 by a simple annealing process. Studies on the fabrication of nanosized structures are necessary for the simple and easy production of HSQ nanostructures because of their unique characteristics. In this study, a fabrication method was developed for HSQ nanostructures as small as 50 nm using a direct printing technique with a poly (dimethylsiloxane) (PDMS) mold. Using this technique, HSQ nanostructures can be fabricated on a curved substrate (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3628585]
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Collections - College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles
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