Color emission and dielectric properties of Eu-doped Gd2O3 gate oxide thin films
- Authors
- Choi, Sungho; Park, Byung-Yoon; Ahn, Taek; Kim, Ji Young; Hong, Chang Seop; Yi, Mi Hye; Jung, Ha-Kyun
- Issue Date
- 1-3월-2011
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- Dielectric properties; Gadolinium oxide; Capacitance voltage; Photoluminescence; Sol-gel; Rare earth doping
- Citation
- THIN SOLID FILMS, v.519, no.10, pp.3272 - 3275
- Indexed
- SCIE
SCOPUS
- Journal Title
- THIN SOLID FILMS
- Volume
- 519
- Number
- 10
- Start Page
- 3272
- End Page
- 3275
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/112874
- DOI
- 10.1016/j.tsf.2010.12.030
- ISSN
- 0040-6090
- Abstract
- High-k Gd2O3 used for thin film transistor (TFT) gate insulators has been synthesized via a simple solution process. Phase analysis and capacitive performance reveal that a high dielectric constant of similar to 20 and a low leakage current level of <10(-8) A/cm(2) at 1 MV/cm with a good transparency under the visible wavelength region are readily produced by the sol-gel method. Eu3+ doping leads to an increased dielectric constant induced by the additional electric dipole transition, which is evidently visualized by the photoluminescence behavior and/or by the defect-controlled thin film microstructures. Thus, the solution-processed (Gd,Eu)(2)O-3 film is a viable gate insulator to be considered for the proposed "color emissive" switching devices as well as for the low power-driven TFT devices. (C) 2010 Elsevier B.V. All rights reserved.
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