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Growth of amorphous silica nanowires using nickel silicide catalyst by a thermal annealing process

Authors
Lee, Jin-BokChoi, Chel-JongSeong, Tae-Yeon
Issue Date
3월-2011
Publisher
ELSEVIER SCIENCE BV
Keywords
Silica nanowires; Nickel silicide; Rapid-thermal-annealing
Citation
CURRENT APPLIED PHYSICS, v.11, no.2, pp.199 - 202
Indexed
SCIE
SCOPUS
KCI
Journal Title
CURRENT APPLIED PHYSICS
Volume
11
Number
2
Start Page
199
End Page
202
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/113005
DOI
10.1016/j.cap.2010.07.006
ISSN
1567-1739
Abstract
We report on the growth of NiSi2-catalyzed amorphous SiO2 nanowires by rapid-thermal-annealing of Ni (40 nm)/poly-Si(60 nm)/SiO2(110 nm)/undoped Si substrate structures at 900 degrees C in N-2 ambient. The diameter of the nanowires is dependent on the diameter of the NiSi2 catalyst particles; the former is about 16-45% smaller than the later. Considering the presence of the nanoparticles located at the tip of the nanowires, the growth behavior of the a-SiO2 nanowires is described in terms of the generation of SiO vapor and the VLS mechanism. (C) 2010 Elsevier B. V. All rights reserved.
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공과대학 (신소재공학부)
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