Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method
- Authors
- Oh, S.M.; Kang, M.-G.; Do, Y.H.; Kang, C.Y.; Yoon, S.J.; Nahm, S.
- Issue Date
- 2011
- Publisher
- Korean Institute of Electrical and Electronic Material Engineers
- Keywords
- Lead zirconate titanate; Poly(vinylpyrrolidone); Sol-gel; Thickness control
- Citation
- Transactions on Electrical and Electronic Materials, v.12, no.5, pp.222 - 225
- Indexed
- SCOPUS
KCI
- Journal Title
- Transactions on Electrical and Electronic Materials
- Volume
- 12
- Number
- 5
- Start Page
- 222
- End Page
- 225
- ISSN
- 1229-7607
- Abstract
- Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO<inf>2</inf>/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150°C, 350°C and 650°C;. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a P<inf>r</inf> of 40.5 μC/cm2 and an E<inf>c</inf> of 156 kV/cm. © 2011 KIEEME. All rights reserved.
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.