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열처리를 통한 HgSe 나노입자 기반 박막 트랜지스터의 전기적 특성 향상Improved Electrical Characteristics of HgSe Nanoparticle-based Thin Film Transistors by Thermal Annealing

Other Titles
Improved Electrical Characteristics of HgSe Nanoparticle-based Thin Film Transistors by Thermal Annealing
Authors
윤정권조경아김상식
Issue Date
2010
Publisher
한국전기전자학회
Keywords
nanoparticle; thin film transistor; HgSe; nanoparticle; thin film transistor; HgSe
Citation
전기전자학회논문지, v.14, no.3, pp.194 - 198
Indexed
KCI
Journal Title
전기전자학회논문지
Volume
14
Number
3
Start Page
194
End Page
198
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/117567
ISSN
1226-7244
Abstract
In this study, we fabricated the HgSe nanoparticle-based thin film transistors (TFTs) of back gate structure with PVA gate dielectric. The fabricated TFTs show the improved electrical characteristics in the mobility of 16 cm2/Vs and the on/off ratio of 104 after annealing process at 100 oC for 5 min. AFM images demonstrate that the decrease in surface roughness according to annealing process leads to the improvement of electrical characteristics. The change in drain current caused from the conditions of flexible substrate is investigated under 0.6% strain.
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공과대학 (전기전자공학부)
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