Micromachining of Multilayer Thin Films for High-Speed Humidity Sensor Fabrication
- Authors
- Lee, Myung Jin; Kim, Jae Sung; Kwak, Ki-Young; Min, Nam-Ki
- Issue Date
- 8월-2009
- Publisher
- IOP PUBLISHING LTD
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS, v.48, no.8
- Indexed
- SCIE
SCOPUS
- Journal Title
- JAPANESE JOURNAL OF APPLIED PHYSICS
- Volume
- 48
- Number
- 8
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/119526
- DOI
- 10.1143/JJAP.48.08HG01
- ISSN
- 0021-4922
- Abstract
- This paper reports the microfabrication and characteristics of a novel high-speed polyimide-based humidity sensor using an etch process based on a combination of isotropic and anisotropic etching steps with inductively coupled plasma (ICP) and a localized curing of polyimide films on microhotplate. The polyimide capacitive humidity sensors showed a sensitivity of 0.77 pF/percent relative humidity (%RH), a linearity of 0.9995, and a hysteresis of 0.62%RH, a response time of 3 s. In comparison, the sensors with a conventional structure exhibited a time response of 7s. High speed is achieved because a device has many holes and moisture is thus absorbed into the top and side surfaces of polyimide. (C) 2009 The Japan Society of Applied Physics
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Collections - College of Science and Technology > Department of Electro-Mechanical Systems Engineering > 1. Journal Articles
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