A new magnetic bearing using Halbach magnet arrays for a magnetic levitation stage
- Authors
- Choi, Young-Man; Lee, Moon G.; Gweon, Dae-Gab; Jeong, Jaehwa
- Issue Date
- Apr-2009
- Publisher
- AMER INST PHYSICS
- Keywords
- electromagnetic actuators; magnetic bearings; magnetic forces; magnetic levitation; position control
- Citation
- REVIEW OF SCIENTIFIC INSTRUMENTS, v.80, no.4
- Indexed
- SCIE
SCOPUS
- Journal Title
- REVIEW OF SCIENTIFIC INSTRUMENTS
- Volume
- 80
- Number
- 4
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/120339
- DOI
- 10.1063/1.3116482
- ISSN
- 0034-6748
- Abstract
- Next-generation lithography requires a high precision stage, which is compatible with a high vacuum condition. A magnetic levitation stage with six degrees-of-freedom is considered state-of-the-art technology for a high vacuum condition. The noncontact characteristic of magnetic levitation enables high precision positioning as well as no particle generation. To position the stage against gravity, z-directional electromagnetic levitation mechanisms are widely used. However, if electromagnetic actuators for levitation are used, heat is inevitably generated, which deforms the structures and degrades accuracy of the stage. Thus, a gravity compensator is required. In this paper, we propose a new magnetic bearing using Halbach magnet arrays for a magnetic levitation stage. The novel Halbach magnetic bearing exerts a force four times larger than a conventional magnetic bearing with the same volume. We also discuss the complementary characteristics of the two magnetic bearings. By modifying the height of the center magnet in a Halbach magnetic bearing, a performance compromise between levitating force density and force uniformity is obtained. The Halbach linear active magnetic bearing can be a good solution for magnetic levitation stages because of its large and uniform levitation force.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Science and Technology > Department of Electro-Mechanical Systems Engineering > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.