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A new magnetic bearing using Halbach magnet arrays for a magnetic levitation stage

Authors
Choi, Young-ManLee, Moon G.Gweon, Dae-GabJeong, Jaehwa
Issue Date
Apr-2009
Publisher
AMER INST PHYSICS
Keywords
electromagnetic actuators; magnetic bearings; magnetic forces; magnetic levitation; position control
Citation
REVIEW OF SCIENTIFIC INSTRUMENTS, v.80, no.4
Indexed
SCIE
SCOPUS
Journal Title
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume
80
Number
4
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/120339
DOI
10.1063/1.3116482
ISSN
0034-6748
Abstract
Next-generation lithography requires a high precision stage, which is compatible with a high vacuum condition. A magnetic levitation stage with six degrees-of-freedom is considered state-of-the-art technology for a high vacuum condition. The noncontact characteristic of magnetic levitation enables high precision positioning as well as no particle generation. To position the stage against gravity, z-directional electromagnetic levitation mechanisms are widely used. However, if electromagnetic actuators for levitation are used, heat is inevitably generated, which deforms the structures and degrades accuracy of the stage. Thus, a gravity compensator is required. In this paper, we propose a new magnetic bearing using Halbach magnet arrays for a magnetic levitation stage. The novel Halbach magnetic bearing exerts a force four times larger than a conventional magnetic bearing with the same volume. We also discuss the complementary characteristics of the two magnetic bearings. By modifying the height of the center magnet in a Halbach magnetic bearing, a performance compromise between levitating force density and force uniformity is obtained. The Halbach linear active magnetic bearing can be a good solution for magnetic levitation stages because of its large and uniform levitation force.
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College of Science and Technology (Department of Electro-Mechanical Systems Engineering)
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