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UV nanoimprint using flexible polymer template and substrate
- Issue Date
- 3월-2009
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- UV nanoimprint lithography; Hot embossing; DLC coating; Flexible polymer template
- Citation
- MICROELECTRONIC ENGINEERING, v.86, no.3, pp.295 - 298
- Indexed
- SCIE
SCOPUS
- Journal Title
- MICROELECTRONIC ENGINEERING
- Volume
- 86
- Number
- 3
- Start Page
- 295
- End Page
- 298
- ISSN
- 0167-9317
- Abstract
- Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate. (C) 2008 Elsevier B.V. All rights reserved.
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