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Electrical Properties of Ti/Al Ohmic Contacts to Sulfur-Passivated N-Face n-Type GaN for Vertical-Structure Light-Emitting Diodes

Authors
Jung, Se-YeonSeong, Tae-YeonKim, HyunsooPark, Kyung-SooPark, Jae-GwanNamgoong, Gon
Issue Date
2009
Publisher
ELECTROCHEMICAL SOC INC
Keywords
aluminium; annealing; electrical conductivity; elemental semiconductors; gallium compounds; III-V semiconductors; light emitting diodes; molecular beam epitaxial growth; ohmic contacts; passivation; photoluminescence; semiconductor-metal boundaries; silicon; titanium; wide band gap semiconductors; X-ray photoelectron spectra
Citation
ELECTROCHEMICAL AND SOLID STATE LETTERS, v.12, no.7, pp.H275 - H277
Indexed
SCIE
SCOPUS
Journal Title
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume
12
Number
7
Start Page
H275
End Page
H277
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/120943
DOI
10.1149/1.3126529
ISSN
1099-0062
Abstract
We investigate the electrical properties of Ti/Al ohmic contacts on (NH(4))(2)S(x)-passivated N-face n-GaN:Si (4.2x10(18) cm(-3)) grown by molecular beam epitaxy. It is shown that the passivation results in an increase in the photoluminescence intensity of n-GaN. Current-voltage (I-V) measurements show that the passivated samples experience a slight degradation in the electrical properties upon annealing at 300 degrees C, while the untreated samples show some improvement although still nonohmic. Based on the I-V and X-ray photoemission spectroscopy results, we describe the possible mechanisms for the passivation and annealing dependence of the electrical properties of the Ti/Al contacts to the N-face n-GaN.
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SEONG, TAE YEON
공과대학 (신소재공학부)
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