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마이크로 거울의 구동을 위한 저전압 비틀림형 열구동기의 설계 및 제작Design and Fabrication of Low-Voltage Twisting-Type Thermal Actuators for Micromirrors

Other Titles
Design and Fabrication of Low-Voltage Twisting-Type Thermal Actuators for Micromirrors
Authors
김동현박용철박승호권오명최영기이준식
Issue Date
2009
Publisher
대한기계학회
Keywords
Micromirror(마이크로 거울); Thermal Actuator(열 구동기); Twisting-Type(비틀림형)
Citation
대한기계학회논문집 B, v.33, no.10, pp.803 - 810
Indexed
SCOPUS
KCI
Journal Title
대한기계학회논문집 B
Volume
33
Number
10
Start Page
803
End Page
810
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/121811
ISSN
1226-4881
Abstract
Micromirrors have a wide range of applications such as optical switches, laser scanners, and digital projection displays. Due to their low performances and high costs, however, practical applications of micromirrors are quite limited. At present micromirrors demand not only a better design but also a simple fabrication process. In this study a twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO2 and gold thin-film layers. Simplified analytical model has been built to optimize the performance of micromirror. Due to unexpected resistance increase of metal film and alignment mismatch during fabrication process, experimental rotation angles of micromirrors are about 11 ° at applied voltages less than 0.6V. From numerical simulation and analytical studies, however, the next design can provide rotation angles over 20 ° at the same applied voltage
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공과대학 (기계공학부)
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