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Optical properties of BaSm2Ti4O12 thin films studied by using spectroscopic ellipsometry
- Authors
- Yoon, J. J.; Jung, Y. W.; Hwang, S. Y.; Kim, Y. D.; Nahm, S.; Jeong, Y. H.
- Issue Date
- Sep-2008
- Publisher
- KOREAN PHYSICAL SOC
- Keywords
- ellipsometry; BSmT; dielectric function; magnetron sputtering
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.53, no.3, pp.1352 - 1356
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Volume
- 53
- Number
- 3
- Start Page
- 1352
- End Page
- 1356
- ISSN
- 0374-4884
- Abstract
- A spectroscopic ellipsometry (SE) study was performed oil BaSm2Ti4O12 (BSmT) thin films grown on TiN/SiO2/c-Si substrate grown by RF-magnetron sputtering. After deposition, the film was annealed at 400 degrees C under four different conditions of oxygen pressure. For the analysis of the measured spectra, a four-layer model containing a, BSmT film was applied, where the optical property of the BSmT layer was represented by a Tauc-Lorentz dispersion function. Our analysis clearly showed that the refractive index and the extinction coefficient of the BSmT films changed consistently with oxygen pressure during the annealing procedure.
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