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Fabrication and characterisation of CMOS compatible silicon nanowire biosensor
- Authors
- Kang, G. B.; Park, J. M.; Kim, S. G.; Koo, J. G.; Park, J. H.; Sohn, Y. -S.; Kim, Y. T.
- Issue Date
- 31-Jul-2008
- Publisher
- INST ENGINEERING TECHNOLOGY-IET
- Citation
- ELECTRONICS LETTERS, v.44, no.16, pp.953 - 955
- Indexed
- SCIE
SCOPUS
- Journal Title
- ELECTRONICS LETTERS
- Volume
- 44
- Number
- 16
- Start Page
- 953
- End Page
- 955
- ISSN
- 0013-5194
- Abstract
- A silicon nanowire (SiNW) biosensor for label-free and real-time detection has been fabricated by complementary metal-oxide semiconductor (CMOS) technology. For the detection of prostate-specific antigen (PSA) used as a biomarker of prostate cancer the SiNW surface was modified to immobilise the antibody of PSA (anti-PSA). Real-time monitoring reveals the change in conductivity of the SiNW on specific binding of PSA to anti-PSA. For 355 nm SiNW, the response to 10 ng/ml of PSA was 7.3%.
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