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Integrated planar spiral inductors with CoFe and NiFe ferromagnetic layer
- Authors
- Kim, GyoungBum; Cha, Seung-Yong; Hyun, Eun-Kyung; Jung, YoungChai; Choi, YoonSuk; Rieh, Jae-Sung; Lee, Seong-Rae; Hwang, SungWoo
- Issue Date
- 3월-2008
- Publisher
- WILEY
- Keywords
- ferromagnetic spiral inductor; quality factor; inductance; ferromagnetic materials
- Citation
- MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, v.50, no.3, pp.676 - 678
- Indexed
- SCIE
SCOPUS
- Journal Title
- MICROWAVE AND OPTICAL TECHNOLOGY LETTERS
- Volume
- 50
- Number
- 3
- Start Page
- 676
- End Page
- 678
- ISSN
- 0895-2477
- Abstract
- Inductance increase tip to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slit-patterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer. (c) 2008 Wiley Periodicals, Inc.
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