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Integrated planar spiral inductors with CoFe and NiFe ferromagnetic layer

Authors
Kim, GyoungBumCha, Seung-YongHyun, Eun-KyungJung, YoungChaiChoi, YoonSukRieh, Jae-SungLee, Seong-RaeHwang, SungWoo
Issue Date
3월-2008
Publisher
WILEY
Keywords
ferromagnetic spiral inductor; quality factor; inductance; ferromagnetic materials
Citation
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, v.50, no.3, pp.676 - 678
Indexed
SCIE
SCOPUS
Journal Title
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS
Volume
50
Number
3
Start Page
676
End Page
678
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/124022
DOI
10.1002/mop.23180
ISSN
0895-2477
Abstract
Inductance increase tip to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slit-patterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer. (c) 2008 Wiley Periodicals, Inc.
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College of Engineering > School of Electrical Engineering > 1. Journal Articles
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공과대학 (전기전자공학부)
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