이산화탄소 감지소자를 위한 마이크로볼로미터 구조 최적화 및 특성연구

Abstract

In this work, we optimized a microbolometer for application of a CO₂detector by using MEMS technology. Wefabricated a stable thermal isolation structure by varying the lengths of supporting legs which affect bolometerperformance. We could fabricate more stable thermal isolation structure for the microbolometer through the results ofANSYS simulations, and minimize the fabrication processes by using bulk micromachining to use a CO₂detector. Themicrobolometer shows a detectivity of 2.5×109 cmHz1/2/W at a chopper frequency of 8 Hz and a bias current of 6.25Awith a vacuum package of about 3.0×10-³ torr. Therefore, we put to conclusion that the microbolometer optimized inthis experiment could be useful for the application of a CO₂ detector.