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이산화탄소 감지소자를 위한 마이크로볼로미터 구조 최적화 및 특성연구Structure optimization and characterization of a microbolometer for a CO₂ detector
- Other Titles
- Structure optimization and characterization of a microbolometer for a CO₂ detector
- Issue Date
- 2008
- Publisher
- 한국센서학회
- Keywords
- MEMS; microbolometer; infrared; detector; carbon dioxide
- Citation
- 센서학회지, v.17, no.1, pp.75 - 80
- Indexed
- KCI
- Journal Title
- 센서학회지
- Volume
- 17
- Number
- 1
- Start Page
- 75
- End Page
- 80
- ISSN
- 1225-5475
- Abstract
- In this work, we optimized a microbolometer for application of a CO₂detector by using MEMS technology. Wefabricated a stable thermal isolation structure by varying the lengths of supporting legs which affect bolometerperformance. We could fabricate more stable thermal isolation structure for the microbolometer through the results ofANSYS simulations, and minimize the fabrication processes by using bulk micromachining to use a CO₂detector. Themicrobolometer shows a detectivity of 2.5×109 cmHz1/2/W at a chopper frequency of 8 Hz and a bias current of 6.25Awith a vacuum package of about 3.0×10-³ torr. Therefore, we put to conclusion that the microbolometer optimized inthis experiment could be useful for the application of a CO₂ detector.
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Collections - College of Engineering > School of Electrical Engineering > 1. Journal Articles
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