Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
나노임프린트 리소그래피를 이용한 곡면 기판 위에 정렬된 나노 볼 패턴 형성에 관한 연구Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography
- Other Titles
- Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography
- Issue Date
- 2008
- Publisher
- 한국표면공학회
- Keywords
- Nano-sphere; Flexible template; UV nanoimprint lithography; Curved substrate; Nano-sphere; Flexible template; UV nanoimprint lithography; Curved substrate
- Citation
- 한국표면공학회지, v.41, no.6, pp.331 - 334
- Indexed
- KCI
- Journal Title
- 한국표면공학회지
- Volume
- 41
- Number
- 6
- Start Page
- 331
- End Page
- 334
- ISSN
- 1225-8024
- Abstract
- The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at 130℃ and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.