Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition
- Authors
- Jang, Hyunjae; Oh, Changyong; Kim, Tae Hyun; Kim, Hyeong Wook; Lee, Sang Ik; Kim, Bo Sung
- Issue Date
- 15-9월-2021
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- In-Ga-Sn-O (IGTO); Thin-film transistor (TFT); Al2O3; Atomic layer deposition; Hydrogen diffusion; Hydroxyl group
- Citation
- JOURNAL OF ALLOYS AND COMPOUNDS, v.875
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF ALLOYS AND COMPOUNDS
- Volume
- 875
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/127626
- DOI
- 10.1016/j.jallcom.2021.160053
- ISSN
- 0925-8388
- Abstract
- Top gate In-Ga-Sn-O (IGTO) thin-film transistors were fabricated with aluminum oxides (Al2O3) as gate insulators at a low temperature of 150 degrees C. Threshold voltage (V-th) of IGTO TFTs with Al2O3 grown by plasmaenhanced atomic layer deposition (PEALD) increased from -5.2 to 11.5 V with increasing plasma power from 70 to 200 W. However, IGTO TFTs with Al2O3 grown by thermal ALD showed a conductor-like behavior. By adjusting dual-deposition cycle ratio of Al2O3 layer using a sequential process of PEALD and thermal ALD at 150 degrees C, IGTO TFTs exhibited excellent electrical characteristics, with as field-effect mobility of 36.7 cm(2) V-1 s(-1), a V-th of -0.5 V, and a subthreshold slope of 0.18 Vdec(-1) along with large improvement of electrical stability for gate bias stress. Results of analyses of secondary ion mass spectrometry and X-ray photoelectron spectroscopy of IGTO thin films revealed that the performance and electrical stability of low-temperature IGTO TFTs were strongly dependent on the amount of hydroxyl groups and oxygen vacancies in IGTO semiconductors possibly attributed to passivation of oxygen-related defects by hydrogen and water molecules diffused into the IGTO layer during thermal ALD of Al2O3. (C) 2021 Elsevier B.V. All rights reserved.
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Collections - Graduate School > Department of Applied Physics > 1. Journal Articles
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