Growth and piezoelectric properties of amorphous and crystalline (K1-xNax)NbO(3-)based thin films
- Authors
- Woo, Jong-Un; Kim, Sun-Woo; Kim, Dae-Su; Kim, In-Su; Shin, Ho-Sung; Nahm, Sahn
- Issue Date
- 5월-2021
- Publisher
- SPRINGER HEIDELBERG
- Keywords
- K0.5Na0.5NbO3; Thin films; Ferroelectrics; Piezoelectrics; Lead-free materials
- Citation
- JOURNAL OF THE KOREAN CERAMIC SOCIETY, v.58, no.3, pp.249 - 268
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- JOURNAL OF THE KOREAN CERAMIC SOCIETY
- Volume
- 58
- Number
- 3
- Start Page
- 249
- End Page
- 268
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/128127
- DOI
- 10.1007/s43207-021-00108-6
- ISSN
- 1229-7801
- Abstract
- (K1-xNax)NbO3 (KNN)-based piezoelectric thin films have been extensively studied for application in micro-electromechanical systems. However, growing homogenous crystalline (K1-xNax)NbO3 (CKNN) films with good piezoelectric properties is difficult because Na2O and K2O evaporate during the growth process at high temperatures. Recently, amorphous (K1-xNax)NbO3 (AKNN) films containing KNN nanocrystals with good piezoelectric properties have been fabricated at low temperatures. Furthermore, [001]-oriented crystalline (K1-xNax)NbO3 (OCKNN) films with excellent piezoelectric properties have been grown at low temperatures (<= 350 degrees C) using a metal-oxide nanosheet seed layer. This novel method is excellent for the growth of homogeneous KNN thin films. These films were deposited on a polymer substrate; thus, they can be utilized in future flexible electronic devices. In this study, the structural and piezoelectric properties of AKNN- and CKNN-based films fabricated at high temperatures, along with the growth process and application of OCKNN-based thin films at low temperatures, are reviewed.
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Collections - College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles
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