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Influence of Annealing Temperature and Time on HfZrO Ferro-CapacitorInfluence of Annealing Temperature and Time on HfZrO Ferro-Capacitor
- Alternative Title
- Influence of Annealing Temperature and Time on HfZrO Ferro-Capacitor
- Authors
- LEE Jae Woo
- Issue Date
- 25-1월-2022
- Publisher
- 한국 반도체 산업협회
- Citation
- 제 29회 한국 반도체학술대회
- Conference Name
- 제 29회 한국 반도체학술대회
- Place
- KO
- Conference Date
- 2022-01-24
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