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Point Cloud Based Representations Learning for Wafer Pattern Recognition in Semiconductor Fabrication ProcessPoint Cloud Based Representations Learning for Wafer Pattern Recognition in Semiconductor Fabrication Process
- Alternative Title
- Point Cloud Based Representations Learning for Wafer Pattern Recognition in Semiconductor Fabrication Process
- Authors
- Jun-Geol Baek
- Issue Date
- 20-7월-2022
- Publisher
- KSPE
- Citation
- International Conference on Precision Engineering and Sustainable Manufacturing 2022 (PRESM 2022)
- Conference Name
- International Conference on Precision Engineering and Sustainable Manufacturing 2022 (PRESM 2022)
- Place
- KO
Jeju, Korea
- Conference Date
- 2022-07-20
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