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A study on the mechanical and electrical properties of atomic and molecular layer deposited ZnO – zincone alloy thin films with change of molecular backbone structuresA study on the mechanical and electrical properties of atomic and molecular layer deposited ZnO – zincone alloy thin films with change of molecular backbone structures
- Alternative Title
- A study on the mechanical and electrical properties of atomic and molecular layer deposited ZnO – zincone alloy thin films with change of molecular backbone structures
- Authors
- Byoung-Ho Choi
- Issue Date
- 30-7월-2018
- Publisher
- American Vacuum Society
- Citation
- ALD 2018 (18th International Conference on Atomic Layer Deposition)
- Conference Name
- ALD 2018 (18th International Conference on Atomic Layer Deposition)
- Place
- KO
- Conference Date
- 2018-07-29
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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