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Atomic Layer Deposition (ALD) 및 Molecular Layer Deposition (MLD) 하이브리드 공정을 활용한 Al-doped ZnO (AZO)/Alucone 다층박막의 인장거동의 평가Evaluation of Tensile Behavior of Al-doped ZnO (AZO)/Alucone Multilayer Thin film by Atomic Layer Deposition (ALD) and Molecular Layer Deposition (MLD) Hybrid Methods
- Alternative Title
- Evaluation of Tensile Behavior of Al-doped ZnO (AZO)/Alucone Multilayer Thin film by Atomic Layer Deposition (ALD) and Molecular Layer Deposition (MLD) Hybrid Methods
- Authors
- Byoung-Ho Choi
- Issue Date
- 1-11월-2017
- Publisher
- 대한기계학회
- Citation
- 대한기계학회 2017년도 학술대회
- Conference Name
- 대한기계학회 2017년도 학술대회
- Place
- KO
- Conference Date
- 2017-11-01
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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