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Formation of Air Void on Patterned Sapphire Substrate by Selective Photoresist CarbonizationFormation of Air Void on Patterned Sapphire Substrate by Selective Photoresist Carbonization
- Alternative Title
- Formation of Air Void on Patterned Sapphire Substrate by Selective Photoresist Carbonization
- Authors
- BYUN, Dong Jin
- Issue Date
- 25-8월-2017
- Publisher
- The Materials Science Society of Japan
- Citation
- Japan-Korea Materials Science Technology 2017
- Conference Name
- Japan-Korea Materials Science Technology 2017
- Place
- JA
- Conference Date
- 2017-08-24
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