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Optimal feature extraction and selection method for PdM (Predictive Maintenance) of roots-vacuum-pump in semiconductor manufacturing processOptimal feature extraction and selection method for PdM (Predictive Maintenance) of roots-vacuum-pump in semiconductor manufacturing process
- Alternative Title
- Optimal feature extraction and selection method for PdM (Predictive Maintenance) of roots-vacuum-pump in semiconductor manufacturing process
- Authors
- Jun-Geol Baek
- Issue Date
- 19-7월-2017
- Publisher
- IFORS
- Citation
- 21st Conference of the International Federation of Operational Research Societies (IFORS 2017)
- Conference Name
- 21st Conference of the International Federation of Operational Research Societies (IFORS 2017)
- Place
- CN
Quebec City, Canada
- Conference Date
- 2017-07-17
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