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Effects of magnetic field shielded sputtering process on the properties of InGaZnO thin film transistorEffects of magnetic field shielded sputtering process on the properties of InGaZnO thin film transistor
- Alternative Title
- Effects of magnetic field shielded sputtering process on the properties of InGaZnO thin film transistor
- Authors
- Hong MunPyo
- Issue Date
- 27-9월-2016
- Publisher
- KVS(The Korean Vaccuum Society)
- Citation
- ICMAP 2016(The 6th International Confernce on Microelectronics and Plasma Technology)
- Conference Name
- ICMAP 2016(The 6th International Confernce on Microelectronics and Plasma Technology)
- Place
- KO
- Conference Date
- 2016-09-26
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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