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Pretreatment method by selective ion-implantation for epitaxial lateral overgrowth of GaN on patterned sapphire substratePretreatment method by selective ion-implantation for epitaxial lateral overgrowth of GaN on patterned sapphire substrate
- Alternative Title
- Pretreatment method by selective ion-implantation for epitaxial lateral overgrowth of GaN on patterned sapphire substrate
- Authors
- BYUN, Dong Jin
- Issue Date
- 25-8월-2016
- Publisher
- The Korean Cacuum Society
- Citation
- 20th International Vaccum Congress
- Conference Name
- 20th International Vaccum Congress
- Place
- KO
- Conference Date
- 2016-08-21
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