반도체 공정의 효율적인 제어를 위한 Adaptive-MPC 알고리듬

Jun-Geol Baek

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반도체 공정의 효율적인 제어를 위한 Adaptive-MPC 알고리듬

Authors: Jun-Geol Baek

Issue Date: 22-5월-2009

Publisher: 한국경영과학회/대한산업공학회

Citation: 한국경영과학회/대한산업공학회 춘계공동학술대회

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/3185

Conference Name: 한국경영과학회/대한산업공학회 춘계공동학술대회

Place: KO
부산대학교

Conference Date: 2009-05-22

Files in This Item: There are no files associated with this item.

Appears in Collections: College of Engineering > School of Industrial and Management Engineering > 2. Conference Papers

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