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CVD를 이용한 Cu 증착 시 plasma 전처리로 인한 구조적 특성의 비교 분석
- Authors
- BYUN, Dong Jin
- Issue Date
- 21-May-2009
- Place
- 대한민국
- Conference Date
- 2009-05-21 ~ 2009-05-22
- Conference Name
- 2009년도 한국재료학회 춘계학술발표대회 및 제16회 신소재 심포지엄
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Related Researcher
- BYUN, Dong Jin
- College of Engineering