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열반응 상변화 물질을 적용한 나노리소그래피 시스템 해석Photo-Thermal Analysis of Laser-Nanolithography using Phase Change Material
- Alternative Title
- Photo-Thermal Analysis of Laser-Nanolithography using Phase Change Material
- Authors
- Choi, Wonjoon
- Issue Date
- 15-10월-2015
- Publisher
- 한국생산제조학회
- Citation
- 2015 한국생산제조시스템학회 추계학술대회
- Conference Name
- 2015 한국생산제조시스템학회 추계학술대회
- Place
- KO
- Conference Date
- 2015-10-14
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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