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Precise control over oxygen impurities in nano-crystalline silicon thin film processed with a low hydrogen dilution gas system at near room temperaturePrecise control over oxygen impurities in nano-crystalline silicon thin film processed with a low hydrogen dilution gas system at near room temperature

Alternative Title
Precise control over oxygen impurities in nano-crystalline silicon thin film processed with a low hydrogen dilution gas system at near room temperature
Authors
Hong MunPyo
Issue Date
13-8월-2015
Publisher
North Sea Conference & Journal LTD
Citation
ECM4 -4th International Symposium on Energy Challenges and Mechanics
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/33484
Conference Name
ECM4 -4th International Symposium on Energy Challenges and Mechanics
Place
UK
Conference Date
2015-08-11
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Graduate School > Department of Applied Physics > 2. Conference Papers

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