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Development of an Al2O3 Nano-Crystal Structure Single Layer Gas Barrier by Neutral Beam Assisted Sputtering (NBAS) ProcessDevelopment of an Al2O3 Nano-Crystal Structure Single Layer Gas Barrier by Neutral Beam Assisted Sputtering (NBAS) Process

Alternative Title
Development of an Al2O3 Nano-Crystal Structure Single Layer Gas Barrier by Neutral Beam Assisted Sputtering (NBAS) Process
Authors
Hong MunPyo
Issue Date
28-8월-2014
Publisher
KIDS,SID,KDIA
Citation
iMiD2014(The 14th International Meeting on Information Display)
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/38986
Conference Name
iMiD2014(The 14th International Meeting on Information Display)
Place
KO
Conference Date
2014-08-26
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Graduate School > Department of Applied Physics > 2. Conference Papers

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